Slide

Alarm Management System

EIAMS is Alarm Management System from eInnoSys that helps you to not only keep track of alarms generated by the equipment and compare against other equipment of the same type, it can also take user defined actions automatically in response to an alarm resulting in improved yield, cycle-time, OEE and MTTR (mean time to respond). Request A Demo

BENEFITS OF EIAMS:

Allows users to define what actions need to be taken in response to an alarm generated from equipment and takes those actions automatically. Actions can be any combination of -

Stop feeding more wafers into the equipment

Notify appropriate factory personnel

Put the equipment in unscheduled or scheduled maintenance

Hold wafers for engineering evaluation before moving to the next step

Stop processing immediately

Other custom actions

Logs all alarms and compare alarms from one equipment to that of others of the same type

Pareto alarms to help focus on alarms that are most frequently occurring

Case Studies

Prevented misprocessing of 160 wafers/qtr

Reduced equipment downtime by 10%

Improved cycle time by 7%

Alarm Management System
Alarm Management System - einnosys

For more information and pricing