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EIRMS – Recipe Management System

Recipe Management System can help fabs improve yield, engineering efficiencies, OEE and cycle time. Recipe Server works with any equipment in the fab or ATM (assembly, test or packaging manufacturing factory) that has SECS/GEM capability. Custom solution may be created for those equipment that are not SECS/GEM capable. Request A Demo

EIRMS – Recipe Management System workflow

Ensures production lots always run with the appropriate version of the recipe
A saves weeks worth of engineering time annually
Works on all equipment types
EIRMS - Recipe Management System

EIRMS offers following benefits out of the box –

EICMMS - Spare Parts Management System

Ensures all lots are processed with most upto-date version of production released recipe

Saves engineering time in recipe management including copying recipes from one equipment to the others

Maintains audit trail of all recipes along with version control

Takes periodic backups of recipes

EIRMS - Recipe Management System

Works on most equipment types

Partial list of Toolsets:

Canon i5+, i5 and i4 steppers

Matrix System One dry etch

SPEC wet bench

IVS overlay metrology

Ultratech wafer topography & stress measurement metrology equipment

For more information and pricing

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