Integration of E84/E87 Protocols Functionality for Legacy Equipment Using EIGEMBox
Overview
Benefits Of EIGEMBox4000
Seamless Integration Without Equipment Modifications:
E84/E87 Compliance for Legacy Tools—No Upgrades, Full Functionality.
Enhanced Automation and Productivity:
Bridge Legacy Tools to Modern AMHS—Automate Handling, Maximize Throughput.
Cost-Effective Modernization:
Extend Asset Life & Cut Costs—Modern Protocols Without Replacement.
Real-Time Monitoring and Accurate State Detection:
Smart Vision Monitoring for Precise, Real-Time Equipment Communication.
Improved Safety and Reliability in Material Handling:
Secure, Synchronized E84 Handshakes—Reliable Wafer Transfers with AGVs.
Case Study:
One 200mm fab upgraded their plasma-etch equipment to add SECS/GEM capability using EIGEMBox and prevented scrapping of 194 wafers annually.
On average our customers experienced the return on investment (ROI) to be 6 to 8 months.
- Plasma Therm Versaline VLR
- Plasma Therm Versaline VLN
- ARTM-2300TK DeTaper with ProFace HMI
- Varian 3290
- MRC Eclipse
- VSR1
- VSR3
- Sidea PT-903
- ASM E2
- LPE 3061D
- Electrovert Omniflex OV04
- Electrovert Omniflex OV06
- Electrovert Omniflex OV07
- Electrovert Omniflex OV09
- Ecipse Star
- PG300RM
- Solder Ball Jet
- PG200RM
- BCL
- Hitachi M501AWE/M511AE/U511AE
- Screen/SD-80BW
- vacuum drying oven
- SCREEN scrubber as-2000
- IMPLANTER - E500
- RESIST COATING
- KLA Therma- Wave Opti-probe 5240i (Windows)
- KLA Therma-Wave Opti-probe 3290DUV (DOS)
- Rudolph FE VII
- LH3600 Wafer Mounter
- ASM E2000
- LPE 2061
- Towa Y1
- ATM-8200
- XRA-3640
- keysight-4070
- Plasma Therm Versaline VLR
- Cohu-MT9510 XP
- Shibuya SBM370
- Keysight 4070
- DFD641
- Essemtech
- BlueM Oven
- Towa-Y1
- Trim & form
- TEL MK8
- HITACHI M-511AE
- Rorze vat
- Lam TCP9400SE
- STPS Pegasus
- HANMI Autoline
- DFRB-1550
System Components
Challenge: Does not natively support E84/E87 protocols.
Interfaces: Primarily communicates via VGA for display output and SECS/GEM for basic control and data exchange.
Function: Serves as an intelligent bridge, enabling E84/E87 compliance for non-compliant equipment.
- Receives equipment status information from the image capture system.
- Translates this status into standard SECS/GEM messages for the host.
- Manages E84 handshake protocols with AGVs, ensuring safe and efficient material transfer.
Function: Monitors the legacy equipment’s visual output (VGA) in real-time.
Technology: Employs advanced image processing algorithms to accurately identify critical equipment states, such as:
- Ready to Load: Equipment is prepared to receive a new cassette.
- Ready to Unload: Equipment has completed processing and is ready for cassette removal.
Role: Central control system for the fabrication facility.
Interaction: Receives detailed equipment status updates via SECS/GEM from the EIGEMBox.
Action: Dispatches and coordinates AGV movements based on the received equipment readiness signals.
Function: Executes cassette loading and unloading operations.
Protocol: Communicates with the EIGEMBox using the E84 handshake protocol for synchronized material transfer.
Related Products and Services
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FAQ's
1) What is EIGEMBox, and how does it work?
EIGEMBox is a plug-and-play solution designed to enable E84/E87 protocol compliance for legacy equipment. It bridges the communication gap between non-compliant tools and modern AMHS systems by converting equipment status signals into standardized SECS/GEM events and managing E84 handshakes for automated material handling.
2) Can EIGEMBox be used with all legacy equipment?
EIGEMBox is compatible with most legacy semiconductor equipment that uses VGA output for display and SECS/GEM for basic communication. It requires an image capture system to interpret equipment status and can be customized for specific use cases.
3) What protocols does EIGEMBox support?
EIGEMBox supports the E84 (handshake protocol) and E87 (carrier management protocol) standards, enabling seamless integration with Automated Material Handling Systems (AMHS), including AGVs and RGVs.
4) Do I need to update my equipment’s firmware to use EIGEMBox?
No, EIGEMBox operates without requiring any firmware updates to the legacy equipment, making it a non-intrusive and cost-effective solution.
5) What role does the image capture system play in the EIGEMBox setup?
The image capture system monitors the equipment’s VGA output in real time, analyzing visual data to identify operational states like “Ready to Load” and “Ready to Unload.” This data is then sent to EIGEMBox for further processing.
6) How does EIGEMBox integrate with AGVs?
EIGEMBox communicates with AGVs via the E84 handshake protocol. It ensures synchronized material transfer by initiating and managing signals when AGVs arrive at the equipment.
7) What are the benefits of using EIGEMBox?
- Enables E84/E87 compliance for legacy tools.
- Eliminates the need for costly hardware modifications.
- Increases automation and reduces manual handling.
- Extends the operational life of legacy equipment.
- Seamlessly integrates with existing host systems and AGVs.
8) Is EIGEMBox difficult to configure and install?
No, EIGEMBox is designed as a plug-and-play solution. It can be easily installed and configured without disrupting the existing equipment or production workflow.
9) How does EIGEMBox improve factory automation?
EIGEMBox enables legacy tools to communicate with modern AMHS systems, reducing manual handling, increasing throughput, and optimizing overall factory automation processes.
10) Can EIGEMBox help reduce costs in legacy tool modernization?
Yes, EIGEMBox provides a cost-effective alternative to expensive hardware replacements or firmware upgrades. By modernizing existing tools, it maximizes ROI and extends the lifecycle of legacy assets.