In a legacy semiconductor manufacturing setup, several 200mm Fab tools lack built-in support for E84 (handshake protocol) and E87 (carrier management protocol)—essential for seamless integration with AMHS systems like AGVs, RGVs, and conveyors, commonly found in 300mm Fabs.
Challenge
- Legacy equipment cannot interface with automated transport systems due to missing E84/E87 protocol support.
- Manual wafer handling is required, resulting in lower throughput and higher labor dependency.
- Equipment is still operationally sound but lacks the communication bridge to AMHS infrastructure.
Solution: Plug & Play with Patented EIGEMBox
By connecting the EIGEMBox between the host and the legacy equipment:
- The SECS/GEM communication is established via plug-and-play.
- The box translates signals and enables E84/E87 protocol support without altering the equipment firmware.
- It links the tool to robotic arms and conveyors through a standardized interface, effectively modernizing legacy equipment.
Results
- Equipment gains real-time AMHS capability, enabling automated material flow.
- The factory floor experiences a productivity boost without expensive hardware upgrades.
- Companies extend the ROI of their legacy assets while meeting modern automation standards.
Upgrade Your Legacy Tools Today. Integrate EIGEMBox for seamless SECS/GEM and AMHS compatibility. Contact us to learn how.