Client Profile
Client: A leading semiconductor manufacturing company in Singapore
Industry: Semiconductor Manufacturing
Challenges
The client faced several challenges with their legacy KLA-Tencor 5300 Overlay tool, including:
Lack of SECS/GEM Interface: The tool lacked native SECS/GEM compliance, a critical requirement for modern semiconductor manufacturing processes.
Limited Automation: Absence of real-time data exchange with the factory automation system led to inefficiencies and delays.
High Manual Effort: Operators were required to manually input and retrieve data, increasing the risk of errors and reducing productivity.
Downtime Concerns: Implementing upgrades on an active production line without causing downtime posed a significant challenge.
Solution
Einnosys provided a seamless and cost-effective solution by integrating the EIGEMBox, a plug-and-play interface designed for SECS/GEM enablement. The key steps included:
Customized Integration: The EIGEMBox was configured to map the operational workflows of the KLA-Tencor 5300 tool into SEMI-compliant SECS/GEM commands.
Non-Invasive Installation: The solution was implemented without requiring hardware modifications, preserving the tool’s integrity.
Enhanced Capabilities: The integration added real-time data exchange, remote monitoring, and diagnostics features.
Collaboration with Stakeholders: Close coordination with the client’s IT and operations teams ensured alignment with their factory automation system and minimal disruption to production.
Testing and Validation
To ensure a smooth transition and robust performance, the following steps were undertaken:
Compliance Testing: The system underwent rigorous bench testing to validate SECS/GEM message compliance with SEMI standards.
Phased Rollout: The integration was deployed in stages, starting with a controlled environment before full-scale implementation.
Operational Validation: End-to-end testing was conducted in a live production environment, confirming seamless communication with the factory host system.
Risk Mitigation: Redundant safety measures were implemented to prevent any operational downtime during the transition.
Results
The integration of SECS/GEM on the KLA-Tencor 5300 Overlay tool delivered significant improvements:
Full Compliance: The tool achieved 100% compliance with SECS/GEM protocols, enabling standardized communication with the factory automation system.
Increased Efficiency: Automated data exchange reduced setup times for new production recipes by 50%, streamlining operations.
Improved Monitoring: Real-time data access enhanced tool performance monitoring, allowing for faster fault detection and resolution.
Reduced Manual Effort: The integration minimized manual intervention, increasing productivity and lowering error rates.
Seamless Implementation: The solution was deployed without any production downtime, ensuring uninterrupted operations.
Feedback
The integration of SECS/GEM on our KLA-Tencor 5300 using EIGEMBox exceeded our expectations. The solution was efficient, cost-effective, and seamlessly brought our legacy tool into the Industry 4.0 era. Einnosys demonstrated exceptional expertise and professionalism throughout the project.”— Automation Engineer