Client: Leading Semiconductor Fab, Philippines
Industry: Semiconductor Manufacturing
Product Used: EIGEMBox by eInnoSys
Equipment: Disco DFG8560 Back Grinder
The client, a major semiconductor manufacturer in the Philippines, faced a critical automation bottleneck. Their Disco DFG8560 Back Grinder, a high-performance wafer thinning tool, lacked native SECS/GEM communication capabilities. This limitation hindered integration with the fab’s MES (Manufacturing Execution System) and AMHS (Automated Material Handling System), resulting in:
- Manual data logging and recipe management
- Increased risk of human error
- Limited remote monitoring and control
- Reduced overall equipment efficiency (OEE)
Upgrading the equipment or replacing it with newer models was not financially viable, with estimated costs exceeding $3 million.
Solution
The fab partnered with eInnoSys to deploy EIGEMBox. This patented plug-and-play solution adds SECS/GEM capability to legacy equipment without any hardware or software installation on the tool itself.
Using only the display output (HDMI) and optional keyboard/mouse ports, EIGEMBox captured the machine’s GUI and translated it into SECS/GEM-compatible signals. This enabled:
- Full host communication
- Remote start/stop and recipe download
- Real-time data collection and fault detection
- Seamless AMHS integration using E84/E87 protocols
Setup took less than an hour, with zero downtime or risk to the grinder’s operation.
Testing & Validation
The integration was validated through a series of rigorous tests:
- Recipe Management: Verified remote recipe download and execution.
- Data Logging: Confirmed real-time parameter exchange and historical data capture.
- Automation: Enabled remote start/stop and alarm monitoring.
- AMHS Compatibility: Successfully integrated with the fab’s E84/E87-based material handling system.
All tests passed with high reliability, and no adverse effects were observed on the grinder’s performance.
Results
- 100% SECS/GEM Compliance achieved on a previously non-compliant tool.
- Zero Equipment Downtime during deployment.
- Improved OEE through automation and reduced manual intervention.
- Cost Savings: Over $3 million saved by avoiding equipment replacement.
- Enhanced Yield: Prevented scrapping of ~194 wafers annually due to improved process control.
Client Feedback
“EIGEMBox transformed our legacy Disco DFG8560 into a fully automated, SECS/GEM-compliant tool in under an hour. The integration was seamless, and the impact on our fab’s efficiency was immediate. We’re now rolling this out across other legacy tools.”
— Fab Automation Lead, Semiconductor Manufacturer, Philippines
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