Client Profile: A leading semiconductor manufacturing company based in Singapore, renowned for its high-precision wafer testing processes and commitment to innovation in the semiconductor industry.
Industry: Semiconductor Manufacturing
Challenges:
The client faced limitations in automating data communication between their existing ACCRETECH SS20 wafer inspection tool and the Manufacturing Execution System (MES). Manual data entry led to inefficiencies, delayed decision-making, and increased the risk of operator-induced errors. Furthermore, the lack of standardized SECS/GEM integration hindered the scalability of their factory automation roadmap.
Solution:
To address these challenges, the EIGEMBox—a compact, plug-and-play SECS/GEM connectivity solution—was deployed. It enabled seamless communication between the SS20 tool and the MES without requiring intrusive modifications to the tool’s firmware.
Key elements of the solution included:
- Rapid SECS/GEM enablement using EIGEMBox’s modular configuration system
- Custom mapping of GEM events and data variables for process traceability
- Real-time monitoring and control of the tool from the host system
- Minimal downtime during deployment, ensuring uninterrupted operations
Testing & Validation:
The integration process followed a structured plan comprising simulation, validation, and production testing.
- Initial Simulation: A digital twin of the SS20 was configured to test GEM events in a controlled environment.
- Field Validation: On-tool installation and handshake verification with the MES were carried out over a three-day window.
- Production Testing: Real-world job execution cycles were monitored, with over 500 wafers processed to assess data accuracy and communication reliability.
- No discrepancies were observed in message exchange, and logging diagnostics confirmed 100% transaction consistency.
Results:
- 100% SECS/GEM Compliance: Full alignment with SEMI standards enabled the client to scale toward Industry 4.0 practices.
- 80% Reduction in Manual Intervention: Automated data capture and job dispatching improved operational efficiency.
- Real-Time Visibility: Engineers gained remote insight into wafer inspection performance, boosting responsiveness.
- Standardized Framework: With one integration, the client established a blueprint for future tool onboarding across its fabs.
Client Feedback:
“Our team was skeptical about a non-invasive solution for SECS/GEM integration, but EIGEMBox proved itself in both flexibility and performance. The seamless setup and clear documentation made a complex task incredibly straightforward. We’re now exploring similar rollouts across other legacy equipment.”
– Sr. Equipment Manager, Automation Division