In the fast-paced semiconductor industry, seamless communication between tools and factory host systems is vital for achieving automation, efficiency, and data-driven decision-making. Many 200 mm fabrication facilities still operate with legacy equipment that lacks native SECS/GEM capabilities. One such example is the Canon FPA 5000 ES3 (248 nm DUV Step-and-Scan Lithography System), a proven and reliable system used worldwide.
To bring this legacy tool into compliance with modern automation requirements, Einnosys successfully implemented its flagship product — EIGEMBox, a turnkey SECS/GEM integration solution.
The Challenge
The Canon FPA 5000 ES3 is a robust lithography tool designed for 200 mm wafer processing, but like many legacy systems, it was not originally equipped with SECS/GEM protocol support.
This limitation created challenges for fabs aiming to:
- Connect the tool to host automation systems (MES/EAP).
- Enable data collection, event monitoring, and alarm reporting.
- Achieve SECS/GEM compliance for uniform fab automation.
Without SECS/GEM communication, the fab’s automation framework could not fully monitor or control the Canon system, leading to manual operations, inefficiencies, and limited data visibility.
The Solution: EIGEMBox
To address these challenges, Einnosys deployed the EIGEMBox, an advanced and compact SECS/GEM gateway designed to enable communication between legacy equipment and modern host systems.
The EIGEMBox acted as a bridge interface, converting native Canon equipment signals into fully SEMI E4/E5/E30 compliant SECS/GEM messages, without requiring major hardware or software modifications to the tool.
Key implementation highlights:
- Quick and non-invasive installation.
- Full support for SECS-I and HSMS-SS (Ethernet) communication.
- Real-time data, event, and alarm collection.
- Custom configuration to align with factory EAP/MES protocols.
- Validation and certification for GEM compliance by the fab’s automation team.
Benefits of EIGEMBox
The integration of EIGEMBox transformed the Canon FPA 5000 ES3 into a fully SECS/GEM-compliant system, delivering multiple operational benefits:
✅ Automation Enablement – The fab achieved seamless host-to-equipment communication, supporting remote control, data collection, and event reporting.
✅ Reduced Manual Intervention – Automated monitoring minimized operator involvement, improving throughput and reducing human error.
✅ Enhanced Data Visibility – Real-time equipment data was now available for predictive maintenance and process optimization.
✅ Cost-Effective Retrofit – No need for expensive equipment replacement or software rewriting.
✅ Faster Time-to-Production – EIGEMBox enabled quick deployment, allowing the fab to achieve compliance in just a few days.
By using EIGEMBox, the fab successfully upgraded its legacy Canon tool to align with modern automation standards, extending its operational life and maximizing ROI.
The success of integrating EIGEMBox with the Canon FPA 5000 ES3 exemplifies how legacy tools can be efficiently upgraded for modern fab automation.
EIGEMBox not only enabled SECS/GEM compliance but also empowered the fab with better control, real-time data access, and enhanced productivity — all without replacing the existing tool.
For fabs and OEMs seeking reliable SECS/GEM integration for legacy or new systems, EIGEMBox by Einnosys offers the perfect balance of performance, simplicity, and scalability.
About Einnosys
Einnosys is a global technology company specializing in Factory Automation, SECS/GEM integration, AI/ML, IoT, and Industry 4.0 solutions for semiconductor fabs and equipment manufacturers.
With decades of experience in semiconductor automation, Einnosys delivers turnkey SECS/GEM SDKs, integration services, and edge gateway products such as EIGEMBox to enable seamless communication, compliance, and smart manufacturing transformation.
FAQs: SECS/GEM Integration on Canon FPA 5000 ES3 with EIGEMBox
1. What challenge did Einnosys solve with EIGEMBox for the Canon FPA 5000 ES3?
Einnosys addressed the lack of SECS/GEM connectivity in the Canon FPA 5000 ES3 200 mm lithography tool. Using EIGEMBox, the equipment was upgraded to support data collection, event reporting, and host communication, enabling full factory automation compliance.
2. What is EIGEMBox and how does it help in SECS/GEM integration?
EIGEMBox is a plug-and-play middleware solution by Einnosys that enables SECS/GEM functionality on legacy or “dumb” semiconductor tools. It bridges the communication gap between equipment and factory host systems without requiring any hardware modification.
3. Does the Canon FPA 5000 ES3 support SECS/GEM by default?
No, older Canon FPA 5000 ES3 models (especially 200 mm systems) do not natively support SECS/GEM protocol. EIGEMBox provides this functionality externally, making the equipment GEM-compliant.
4. What benefits did the customer achieve after integrating EIGEMBox?
After SECS/GEM integration, the customer gained real-time equipment monitoring, automated data logging, event and alarm collection, and improved OEE (Overall Equipment Effectiveness). It also reduced manual data entry and human intervention in operations.
5. Is EIGEMBox compatible with other Canon lithography tools?
Yes. EIGEMBox can be integrated with various Canon lithography systems, as well as tools from other OEMs. It supports both 200 mm and 300 mm tool generations, making it a universal retrofit solution.
6. How long does it take to deploy EIGEMBox for SECS/GEM integration?
Typical deployment takes between 2 to 4 weeks, depending on tool type, host configuration, and customer requirements. Einnosys provides remote or on-site integration support to ensure smooth implementation.
7. Does EIGEMBox support GEM300 and advanced SECS/GEM features?
Yes, EIGEMBox is designed to comply with SEMI E4, E5, E30 (GEM), and E37 (HSMS) standards. It can also support GEM300 extensions for advanced wafer handling and process automation if required.
8. Why choose Einnosys for SECS/GEM integration services?
Einnosys specializes in factory automation, SECS/GEM solutions, and semiconductor software development. With years of expertise and proven products like EIGEMBox, Einnosys ensures fast, reliable, and compliant integration for both new and legacy tools.