Introduction
In the fast-paced world of semiconductor manufacturing, automation and connectivity are no longer optional—they are essential. Factories demand seamless integration between legacy equipment and modern factory automation systems to stay competitive. However, achieving this balance without costly equipment modifications is a challenge many fabs face.
Einnosys, a trusted name in semiconductor automation solutions, addressed this challenge with its patented product EIGEMBox. This success story highlights how Einnosys successfully integrated SECS/GEM on SUS ACS200 equipment in a 200mm fab, unlocking advanced automation, data extraction, and AMHS integration.
The Challenge
The SUS ACS200 equipment, widely used in semiconductor fabs, lacked native SECS/GEM capability. This posed significant limitations:
- No standard communication protocol for factory host integration
- Difficulty connecting with AMHS (Automated Material Handling System)
- Limited ability to collect, analyze, and use process data
- High costs and risks associated with modifying or upgrading legacy equipment
The fab needed a solution that would enable SECS/GEM communication quickly, safely, and cost-effectively—without interrupting production or risking equipment stability.
The Solution: EIGEMBox
Einnosys introduced its EIGEMBox, a patented plug-and-play solution designed to enable SECS/GEM communication on legacy semiconductor equipment. The EIGEMBox was implemented on the SUS ACS200 equipment, delivering immediate connectivity and automation capabilities.
Key Features Implemented:
Enhancing SECS/GEM Communication – Enabled standard SECS/GEM host connectivity for seamless integration.
AMHS Integration in 200mm Fab – Connected the equipment with automated material handling for better workflow.
Advanced SECS/GEM Data Extraction – Allowed data collection and real-time analysis to support advanced process control and Fault Detection & Classification (FDC).
The EIGEMBox required no hardware or software changes to the ACS200, ensuring 100% safe and smooth deployment.
Benefits of EIGEMBox
1. SECS/GEM Enablement
The EIGEMBox instantly enabled SECS/GEM, OPC, and Modbus communication capabilities on the SUS ACS200 equipment, transforming a legacy tool into a fully connected system.
2. 100% Safe Deployment
Since no direct hardware or software installation was required on the equipment, the risk of machine lock-ups, performance slowdowns, or downtime was eliminated.
3. Automation Capabilities
The fab was able to leverage automation features such as:
- Data collection & analysis
- Fault Detection & Classification (FDC)
- Recipe download
- Remote start and stop
- Process monitoring
These improvements drove higher accuracy, reduced manual interventions, and streamlined fab operations.
4. Cost-Effective Integration
By avoiding expensive equipment upgrades, the fab saved significant capital costs. At the same time, yield, OEE (Overall Equipment Effectiveness), cycle time, and process efficiency improved, lowering the cost of manufacturing.
5. Trusted and Reliable
The EIGEMBox ensured zero side effects—no machine lock-ups or slowdowns—maintaining the ACS200’s optimal performance while adding powerful connectivity.
The Results
The implementation was a resounding success. Within a short time, the fab achieved:
- Full SECS/GEM connectivity on the SUS ACS200 equipment
- Smooth AMHS integration in the 200mm fab environment
- Advanced process data extraction for analytics and FDC
- Reduced operational costs and higher manufacturing efficiency
- A future-ready system without the risks of direct equipment modification
The fab team reported that the EIGEMBox not only solved immediate connectivity challenges but also positioned them for future factory automation initiatives.
Customer Perspective
The fab’s engineering team appreciated how quickly and smoothly the EIGEMBox was deployed. Without downtime or disruptions, they gained powerful new automation capabilities and reliable SECS/GEM host communication.
They highlighted the cost-effectiveness of the solution, as it avoided expensive hardware/software upgrades and delivered immediate ROI through improved productivity and reduced manual effort.
About Einnosys
Einnosys is a global leader in semiconductor automation and digital transformation solutions. With offices in the USA and India, Einnosys has been empowering semiconductor fabs, assembly/test facilities, and OEMs with innovative products and services for over a decade.
Our flagship product, EIGEMBox, is a patented plug-and-play solution designed to enable SECS/GEM connectivity on legacy semiconductor equipment—without risk, downtime, or additional hardware/software installation.
We are trusted by fabs worldwide for delivering reliable, cost-effective, and future-ready automation solutions that enhance yield, cycle time, OEE, and overall manufacturing performance.
Conclusion
The successful integration of SECS/GEM on SUS ACS200 equipment using the EIGEMBox demonstrates how fabs can modernize legacy tools without the risks and costs of major upgrades. With enhanced communication, automation, and AMHS integration, the fab achieved improved efficiency, reduced costs, and future-proofed its operations.