SEMI E37: High Speed Message Service (HSMS)
- SEMI E4
- SEMI E5
- SEMI E30
What is SEMI E37: HSMS?
The SEMI E37 standard defines the High Speed Message Service (HSMS), a revolutionary TCP/IP-based communication protocol that transforms how semiconductor manufacturing equipment exchanges data. Unlike traditional serial connections, SEMI E37: HSMS leverages modern network infrastructure to deliver the speed, flexibility, and scalability demanded by today's advanced fabrication facilities. At its core, HSMS provides a standardized communication interface that enables independent equipment manufacturers to create implementations that interoperate seamlessly without requiring specific knowledge of each other's systems. This vendor-independent approach ensures your factory automation infrastructure remains flexible and future-ready, regardless of which equipment suppliers you choose.
Why High Speed Message Service Matters
Modern semiconductor manufacturing generates massive amounts of data. Real-time process monitoring, advanced process control, and predictive maintenance all depend on rapid, reliable communication between equipment and host systems. The High Speed Message Service addresses these needs by replacing the bandwidth-limited serial connections of SEMI E4 (SECS-I) with high-performance TCP/IP networking.
When your facility requires communication speeds beyond traditional SECS-I capabilities, complex network topologies with multiple interconnected systems, or integration with existing Ethernet infrastructure, SEMI E37: HSMS becomes the logical choice. However, SEMI E4 remains perfectly suitable for simpler applications where these advanced features aren’t necessary.
HSMS Generic Services Architecture
The protocol operates as a connection-oriented service using standard TCP/IP. Communication follows a client-server model where equipment and host systems establish logical connections through a well-defined handshake process. This architecture supports both simple point-to-point configurations and complex multi-node topologies that scale with your manufacturing needs.
Connection Establishment Example
Step 1: TCP Connection Initiated Client connects to Server on Port 5000 Step 2: Select Request Message Direction: Client → Server Message Type: Select.req Session ID: 0xFFFF (Unselected state) Purpose: Request logical connection Step 3: Select Response Message Direction: Server → Client Message Type: Select.rsp Session ID: 0x0001 (Assigned session) Status: 0 (Connection accepted) Step 4: Communication State State: SELECTED Ready for SECS-II message exchange Linktest monitoring active
Technical Insight: The High Speed Message Service establishes a logical session on top of the physical TCP connection. This two-layer approach provides robust connection management with automatic health monitoring through periodic linktest messages, ensuring reliable communication even in demanding factory environments.
Key Advantages of HSMS Protocol
Superior Performance
Network speeds from 100 Mbps to 10 Gbps compared to SECS-I's maximum 19.2 Kbps, enabling real-time data streaming and high-frequency monitoring.
Flexible Topology
Support for complex network architectures including star, mesh, and redundant configurations that adapt to your facility layout and reliability requirements.
Standard Infrastructure
Leverage existing Ethernet switches, routers, and network management tools, reducing infrastructure costs and simplifying maintenance.
Extended Distance
Communication across entire factory floors or between buildings without signal degradation, eliminating the distance limitations of serial cables.
Enhanced Reliability
Single equipment can maintain simultaneous connections to multiple host systems, supporting redundancy and distributed control architectures.
Enhanced Reliability
TCP/IP's built-in error detection combined with HSMS connection monitoring ensures data integrity and automatic recovery from transient network issues.
HSMS Message Structure
The SEMI E37: HSMS protocol wraps SECS-II messages with a ten-byte header that provides session management and message routing information. This header includes the session identifier linking messages to specific logical connections, stream and function codes identifying message types, presentation and session type bytes controlling message handling, and system bytes enabling transaction tracking.
Every HSMS transmission begins with a four-byte length field specifying the total message size, followed by the ten-byte header, and finally the SECS-II message data. This consistent structure enables efficient message parsing and routing through network infrastructure while maintaining full compatibility with existing SECS-II message definitions.
Subordinate Standards and Extensibility
The SEMI E37 standard intentionally provides a generic framework designed for extension. Subordinate standards build upon this foundation by specifying additional details or imposing restrictions for particular application domains. SEMI E37.1, for example, defines single-session HSMS communication patterns used in most equipment implementations. This layered approach ensures the base protocol remains stable while allowing customization for specific industry needs.
TCP/IP vs OSI Implementation
Originally, SECS Message Services were designed for OSI networking protocols. The High Speed Message Service provides an alternative implementation using TCP/IP, which has become the dominant networking standard worldwide. This choice ensures compatibility with modern network equipment, readily available expertise for network management, and seamless integration with enterprise IT infrastructure including cybersecurity tools and network monitoring systems.
Implementing HSMS in Your Facility
Successful HSMS deployment begins with proper network infrastructure planning. Your factory network should provide dedicated bandwidth for equipment communication, implement VLANs to segregate traffic types, and maintain low latency to prevent communication timeouts. Equipment and host systems must be configured with appropriate active or passive connection modes, timeout values matching your network characteristics, and comprehensive error handling for network disruptions.
Testing should verify correct behavior during normal operation, network failure scenarios, and high message volume conditions. Connection state transitions, automatic reconnection mechanisms, and message sequence integrity all require validation before production deployment. Thorough testing ensures your equipment automation software operates
Future-Ready Manufacturing Communication
As semiconductor manufacturing evolves toward smart factory concepts and Industry 4.0 integration, the SEMI E37: HSMS protocol provides the high-performance foundation required. Its TCP/IP basis ensures compatibility with cloud platforms, big data analytics, and machine learning systems while maintaining proven interoperability with established SECS-II message standards. Investing in HSMS infrastructure today prepares your facility for tomorrow's advanced manufacturing capabilities.
SECS/GEM Integration Products in Singapore
Fabs & Assembly/Test/Packaging Products
- SECS/GEM addition & enhancement on legacy equipment – EIGEMBox & EIGEM-HMI
- E84 & E87 addition on legacy equipment – EIGEMBox
- AI/ML-based health monitoring & predictive maintenance – XPump
- Factory host – EIStationController
- Recipe Management System – EIRMS
- AI/ML based Smart FDC with Predictive Analytics – SeerSight
- Analog Gauge Monitoring – EIGaugeMonitor
- Equipment Simulator – EIGEMSim
- Factory host SDK – EIGEMHost & EIGEM300Host
- Chemical Management – EIBarcodeGuardian
- Spare Parts & Vendor Management – EICMMS
OEMs (Original Equipment Manufacturer) Products
Accelerate Your Equipment Communication
Einnosys delivers comprehensive equipment automation software solutions leveraging the latest SEMI standards. Our expert team provides complete SEMI E37: HSMS implementation from network architecture through production deployment and ongoing optimization.
Frequently Asked Questions
What makes High Speed Message Service faster than SECS-I?
HSMS uses Ethernet networks operating at 100 Mbps, 1 Gbps, or even 10 Gbps compared to SECS-I’s maximum 19.2 Kbps serial connection. This represents a speed increase of over 5,000 times in typical implementations, enabling real-time data streaming and high-frequency process monitoring impossible with traditional serial communication.
Can HSMS and SECS-I coexist in the same facility?
Absolutely. Many facilities operate hybrid environments where newer equipment uses SEMI E37: HSMS while legacy systems continue with SECS-I. Gateway devices can translate between protocols when necessary, allowing gradual migration to network-based communication without disrupting existing operations. Both protocols carry identical SECS-II message content, ensuring seamless integration.
What network infrastructure does HSMS require?
The High Speed Message Service requires standard TCP/IP network infrastructure. Recommended specifications include managed Ethernet switches supporting VLANs, dedicated network segments for equipment communication, network latency consistently under 10 milliseconds, and minimal packet loss rates. While HSMS can function on shared networks, dedicated infrastructure ensures optimal performance and reliability.
How does HSMS handle connection failures?
SEMI E37: HSMS implements comprehensive connection monitoring through periodic linktest messages that verify connection health. If the network connection fails, the protocol supports automatic reconnection with proper state restoration. Equipment and hosts can be configured in active or passive modes to support various failure recovery strategies matching your facility’s reliability requirements.
Is special training needed to implement HSMS?
While the protocol leverages familiar TCP/IP networking, successful implementation requires understanding both network fundamentals and SECS-II messaging standards. Teams should have knowledge of TCP/IP configuration, SECS-II message structure, HSMS connection state management, and factory network best practices. Partnering with experienced specialists significantly accelerates deployment and ensures robust implementations.
What TCP port does HSMS use?
The SEMI E37 standard specifies TCP port 5000 as the default for HSMS communication. However, this is configurable to support multiple connections or avoid port conflicts. The specific port number must be coordinated between equipment and host systems and properly configured in network firewalls to permit bidirectional communication.
How do I get started with HSMS implementation?
Begin by reviewing your current network infrastructure and equipment communication requirements. Assess which equipment supports native HSMS capability versus requiring protocol converters. Plan network architecture including VLAN configuration and bandwidth allocation. Consider partnering with experienced implementation specialists like Einnosys who provide end-to-end High Speed Message Service deployment including network design, protocol development, testing, and production support.
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