Client Profile
Client: A leading semiconductor manufacturing company in the Philippines
Industry: Semiconductor Manufacturing
Challenges
The client, a prominent player in the semiconductor industry, faced operational inefficiencies with their Applied Materials CENTURA W-CVD_3CH system, a critical asset for tungsten deposition. The system’s existing software lacked robust SECS/GEM integration capabilities, essential for seamless communication between equipment and the client’s factory automation system. This resulted in:
Limited Automation: Manual intervention was frequently required, increasing production cycle times and the risk of errors.
Data Gaps: Incomplete equipment data logging hindered real-time monitoring and process optimization.
Scalability Issues: The system struggled to adapt to the client’s growing production demands.
Compliance Challenges: Adherence to SEMI standards for equipment communication was not consistently met, complicating audits and certifications.
Solution
To address these challenges, Einnosys proposed deploying its flagship product, the EIGEMBox. This robust SECS/GEM interface solution was tailored to integrate seamlessly with the Applied Materials CENTURA W-CVD_3CH system, ensuring compliance with SEMI E5 and E30 standards. The implementation process included:
System Assessment: Conducted a detailed analysis of the CENTURA system’s hardware and software capabilities to identify integration points.
Customization: Configured the EIGEMBox to map process parameters, alarms, events, and data collection requirements specific to the client’s workflows.
Integration: Installed and tested the EIGEMBox without disrupting ongoing operations.
This included:
- Mapping SECS/GEM variables to factory MES (Manufacturing Execution System) requirements.
- Implementing custom scripts to automate workflows.
Training: Provided hands-on training to the client’s engineers, enabling them to leverage the new capabilities effectively.
Testing & Validation
The integration process involved rigorous testing to ensure reliability and performance:
Functional Testing: Verified accurate data exchange between the CENTURA system and the MES.
Stress Testing: Ensured the system’s stability under peak production loads.
Compliance Validation: Confirmed adherence to SEMI E37 standards for HSMS (High-Speed SECS Message Services).
User Acceptance Testing (UAT): Conducted with the client’s team to validate end-to-end workflows.
Results
The deployment of EIGEMBox transformed the client’s tungsten deposition process. Key outcomes included:
Enhanced Automation:
95% reduction in manual interventions.
Faster process execution with automated recipe selection and data logging.
Improved Data Accuracy:
Comprehensive data capture enabled real-time monitoring and advanced analytics.
Enhanced traceability for compliance audits.
Scalability:
System seamlessly scaled to accommodate increased production volumes.
Flexible configuration options ensured compatibility with future equipment upgrades.
Compliance:
Fully met SEMI standards, streamlining audits and certifications.
Operational Efficiency:
Reduced downtime due to quick identification and resolution of equipment issues.
Lowered production cycle times by 20%.
The SECS/GEM integration using EIGEMBox proved to be a game-changer for the client’s Applied Materials CENTURA W-CVD_3CH system. By automating workflows, enhancing data management, and ensuring compliance with industry standards, the client achieved significant operational improvements. This success underscores Einnosys’ commitment to delivering innovative solutions that drive efficiency and value for semiconductor manufacturers worldwide.