Transforming Legacy Fab Equipment for Honeywell

Honeywell modernized its legacy semiconductor equipment without expensive OEM upgrades or production downtime using Einnosys smart factory solutions.

Using EIGEMBox, Einnosys enabled non-intrusive SECS/GEM connectivity for SPTS Dry Etch and Novellus systems through existing monitor, keyboard, and mouse ports — eliminating the need for intrusive hardware modifications.

Einnosys also implemented:

• EIStationController – for automated recipe management and real-time FDC data collection
• SeerSight – AI FDC for predictive analytics and smart equipment monitoring
• XPump – AI Monitoring for predictive vacuum pump maintenance
• EIGaugeMonitor – for converting analog gauge readings into digital process data

Key Results

• Reduced scrap and manual process errors
• Enabled predictive maintenance with real-time monitoring
• Achieved zero downtime implementation
• Avoided high OEM upgrade costs
• Improved fab-wide visibility with unified SCADA/FDC dashboards