Smart Factory Automation for Power Semiconductor Manufacturing

Power semiconductor manufacturing requires highly connected, automated, and data-driven production environments to achieve consistent quality, higher equipment utilization, and efficient manufacturing operations. eInnoSys provides Power Semiconductor Manufacturing Automation solutions that connect manufacturing equipment with factory systems using standardized communication technologies and intelligent monitoring solutions.

Our solutions support power semiconductor wafer fabs, SiC semiconductor manufacturers, GaN semiconductor manufacturers, IGBT and MOSFET manufacturers, power device manufacturers, and power semiconductor OSAT/ATMP facilities.

From equipment connectivity and SECS/GEM communication to GEM300, MES integration, OEE, FDC, and AI/ML predictive maintenance, eInnoSys helps power semiconductor manufacturers build a connected and intelligent manufacturing environment.

Key Benefits

Reduce Manual Data Collection

Automatically collect equipment and process data.

Improve Equipment Utilization

Gain real-time visibility into equipment performance and production status.

Reduce Equipment Downtime

Identify equipment abnormalities earlier and support predictive maintenance.

Improve Production Efficiency

Use OEE and equipment data to identify production losses and bottlenecks.

Accelerate Legacy Equipment Modernization

Connect older machines to modern factory automation environments.

Improve Data Accuracy

Replace manual data collection with automated, real-time equipment data.

Faster MES Integration

Connect equipment with MES and factory systems more efficiently.

Support Smart Manufacturing

Build a connected manufacturing environment using real-time data, automation, and AI/ML.

Increase Equipment Reliability

Monitor equipment health and identify potential issues before major failures.

Scalable Factory Automation

Start with individual equipment and expand connectivity across the manufacturing facility.

Ready to Automate Your Power Semiconductor Manufacturing?

Connect equipment, improve production visibility, and enable smarter factory automation with eInnoSys.

Talk to an Expert

Key Features

⚡

SECS/GEM Equipment Connectivity

Connect power semiconductor manufacturing equipment with factory host and MES systems.

◆

GEM300 Automation Support

Enable carrier management, substrate tracking, equipment control, and advanced factory automation.

↻

Legacy Equipment Integration

Modernize existing equipment without replacing the entire machine control system.

▣

MES Integration

Connect equipment data with MES and factory automation systems for centralized production management.

◉

Real-Time Equipment Monitoring

Monitor equipment status, alarms, events, process parameters, and production data.

▥

OEE & Performance Monitoring

Track equipment utilization, availability, performance, and production efficiency.

⌁

FDC & Fault Monitoring

Detect abnormal equipment and process conditions using real-time data and configurable rules.

AI/ML Predictive Maintenance

Use equipment data and analytics to identify potential failures and maintenance requirements.

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Recipe & Process Management

Support controlled recipe handling and process execution across connected equipment.

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Multi-Protocol Connectivity

Integrate equipment and systems using SECS/GEM, OPC UA, MQTT, Modbus, and other industrial interfaces.

Power Semiconductor Manufacturing Process

Power semiconductor manufacturing includes multiple production stages such as wafer fabrication,
inspection, testing, assembly and packaging. eInnoSys helps connect manufacturing equipment
across these stages with factory automation and MES systems for better production visibility
and equipment monitoring.

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Wafer Fabrication

→

◈

Inspection & Metrology

→

▣

Wafer Testing

→

◆

Assembly & Packaging

→

✓

Final Testing

Power Semiconductor Equipment Integration

Power semiconductor factories often use equipment from multiple OEMs and different generations.
eInnoSys helps connect new and legacy equipment with SECS/GEM, GEM300, MES and factory
automation systems.

⚙

Wafer Processing Equipment

Connect process equipment with factory host and MES systems for centralized production visibility.

◈

Inspection & Metrology Equipment

Collect equipment and process data to improve manufacturing visibility and monitoring.

▣

Wafer Testing Equipment

Connect test equipment and make production information available to factory systems.

◆

Assembly & Packaging Equipment

Support equipment connectivity across semiconductor assembly, packaging and testing operations.

◉

Test & Measurement Equipment

Integrate equipment data with higher-level manufacturing and factory automation systems.

↻

Legacy Equipment

Modernize existing manufacturing equipment and connect it with modern factory automation systems.

How Power Semiconductor Equipment Integration Works

eInnoSys connects semiconductor equipment with factory systems, collects equipment and process data, and makes this information available for MES integration, OEE, FDC and predictive maintenance.

Manufacturing
Equipment

→

SECS/GEM
/ GEM300

→

eInnoSys
Connectivity

→

MES / Host
System

→

OEE / FDC /
Analytics

→

AI/ML
Insights

Connect

Connect new and legacy manufacturing equipment with factory systems.

Communicate

Enable standardized SECS/GEM and GEM300 communication where applicable.

Collect

Collect equipment status, alarms, events, parameters and production data.

Integrate

Make equipment information available to MES and factory host systems.

Analyze

Use OEE, FDC and AI/ML analytics to identify performance issues and potential equipment problems.

Blogs

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FAQs

What is Power Semiconductor Manufacturing Automation?

Power Semiconductor Manufacturing Automation connects manufacturing equipment with factory systems such as MES and host systems using technologies such as SECS/GEM, GEM300, equipment monitoring, OEE, FDC, and AI/ML analytics.

Can eInnoSys connect power semiconductor equipment with MES?

Yes. eInnoSys provides equipment connectivity and MES integration to connect manufacturing equipment data with MES and factory host systems for production management, monitoring, and analysis.

Does eInnoSys support SECS/GEM for power semiconductor equipment?

Yes. eInnoSys supports SECS-II, HSMS, GEM functionality, equipment status monitoring, alarms, event reporting, data collection, remote commands, and host-equipment communication.

Does eInnoSys support GEM300 for power semiconductor manufacturing?

Yes. eInnoSys supports GEM300 technologies for advanced semiconductor manufacturing automation, including capabilities related to material management, carrier handling, process control, and production tracking.

Can eInnoSys integrate legacy power semiconductor equipment?

Yes. eInnoSys supports legacy equipment connectivity and modernization, helping manufacturers bring existing equipment into modern factory automation environments without necessarily replacing the equipment.

Does eInnoSys support SiC semiconductor manufacturing automation?

Yes. eInnoSys supports SiC manufacturing through equipment integration, SECS/GEM connectivity, equipment data collection, MES integration, equipment monitoring, OEE, FDC, and AI/ML predictive maintenance.

Does eInnoSys support GaN semiconductor manufacturing automation?

Yes. eInnoSys supports GaN manufacturing through equipment connectivity, SECS/GEM, MES integration, equipment monitoring, and intelligent analytics.

Can eInnoSys monitor equipment performance and OEE?

Yes. eInnoSys solutions can monitor equipment availability, utilization, production performance, downtime, equipment status, alarms, production events, and equipment-related losses to improve factory efficiency.

Does eInnoSys provide FDC and predictive maintenance for power semiconductor equipment?

Yes. eInnoSys supports FDC and equipment monitoring to identify abnormal equipment behavior and trends. AI/ML-based predictive maintenance can analyze equipment data to identify potential issues before unexpected failures occur.