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SECS/GEM & GEM 300

LET OUR EXPERTS SAVE YOU SIGNIFICANT COST AND TIME AND GUARANTEE SUCCESS OF SECS/GEM IMPLEMENTATION OF YOUR EQUIPMENT

For over two decades, eInnoSys team members have been implementing SECS/GEM and GEM300 standards on the equipment as well as using them in the fab/assembly for automation. We offer complete turnkey solution to make your equipment fully SECS/GEM or GEM300 compliant. Our domain knowledge and experience not only helps making your implementation a success but also greatly reduces the time and cost of integration. Our solution comes with required manuals, SECS/GEM and GEM300 compliance report along with required logs for OEMs to provide to their factory customers.

SECS/GEM & GEM300 are a set of communication protocol for a semiconductor equipment and factory host. These standards are maintained by SEMI. While GEM300 refers to a set of communication standards for 300mm wafers, which are more than those for 200mm, SECS/GEM is used as a generic term for both 200 and 300mm communication protocols and other automation standards.

EIGEMEquipment is a SECS/GEM software of eInnoSys, which comes with support for most of the SECS messages for 200mm out‐of‐the‐box.


It provides compliance of following SEMI standards for your equipment
  • E30 – GEM (Generic Equipment Model)
  • E5 – SECS-II message format
  • E37 – HSMS (Ethernet) connectivity
  • E4 – SECS-I serial (RS232) connectivity

Ultra light-­‐weight product, which means more CPU and memory for your controller software, who needs it most

It is a SDK (Software Development Kit) that offers APIs for integration with controller software in multiple languages – C#, Java and C++

Multiple platform support – Windows, Linux, Unix & Android

Comes bundled with EIGEMSim – Simulator software for Fab Host

SECS/GEM Manual is included


EIGEMSim is a SECS/GEM software product of eInnoSys that can be used as a simulator for either Fab host or Equipment for testing of compliance.

If you have already purchased a license of SECS/GEM or GEM300 software from another company, eInnoSys can still help you integrate that software with your controller software and benefit from our vast experience in terms of reducing the time and cost of integration.

GEM300 covers following SEMI standards:
  • E30 – GEM (Generic Equipment Model)
  • E39 – Object Services Standard
  • E40 – Process Job Management
  • E87 – CMS (Carrier Management Specification)
  • E90 – Substrate Tracking
  • E94 – Control Job Management
In addition, following other SEMI standards may be requested by factory customers:
  • E116 – EPT (Equipment Performance Tracking)
  • E157 – Module Process Tracking
  • E148 – Time Synchronization

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