Our client, a prominent semiconductor manufacturing company based in the Philippines, specializes in producing high-quality semiconductor components for global markets. The company’s production floor is equipped with cutting-edge tools, including the DNS SKW-80A-BVP photoresist coater developer, critical to their photolithography process.
Challenges:
The client faced significant challenges in integrating their DNS SKW-80A-BVP tool with their existing Factory Host and Manufacturing Execution System (MES) using SECS/GEM standards. Key issues included:
Lack of Automation: Manual data collection processes led to inefficiencies and delays in decision-making.
Limited Tool Compatibility: The tool’s native interface lacked built-in SECS/GEM capabilities, complicating communication with the factory’s centralized systems.
Operational Inefficiencies: Manual interventions were increasing cycle times, affecting overall productivity and yield.
To remain competitive in the semiconductor industry, the client recognized the need for a seamless SECS/GEM communication protocol to enhance automation, improve process control, and achieve data-driven decision-making.
Solution
Einnosys proposed deploying its EIGEMBox, a plug-and-play SECS/GEM solution, to bridge the compatibility gap between the DNS SKW-80A-BVP tool and the client’s MES. The implementation process involved the following steps:
Customized Integration:
The EIGEMBox was configured to collect key operational data from the tool’s native interface and convert it into SECS/GEM protocol.
Parameters like spin speed, temperature, and photoresist coating thickness were mapped for seamless data transmission to the MES.
Automated Communication Setup:
The EIGEMBox enabled real-time monitoring and bidirectional communication between the tool and the MES, supporting both data logging and remote control commands.
Critical alarms and notifications were integrated to alert operators of deviations, ensuring prompt corrective action.
Operator-Friendly Interface:
A user-friendly dashboard was provided for operators to visualize tool performance and access diagnostic information efficiently.
A user-friendly dashboard was provided for operators to visualize tool performance and access diagnostic information efficiently.
Testing and Validation
To ensure the robustness of the integration, the following processes were conducted:
Simulation Tests: Before deployment, the SECS/GEM communication protocol was thoroughly tested in a simulated environment to validate its compatibility and reliability.
Performance Monitoring: The EIGEMBox was monitored during initial operations to identify and rectify any bottlenecks.
Operator Feedback: Comprehensive training sessions were conducted for the client’s team, incorporating their feedback to refine the system.
Results
The deployment of the EIGEMBox delivered transformative results for the client:
Enhanced Efficiency: Automation reduced cycle times by 25%, significantly improving throughput.
Real-Time Data Availability: The tool now seamlessly communicates with the MES, providing real-time process data critical for quality control.
Improved Yield: By enabling precise monitoring and control, the client observed a 15% improvement in process yield.
Ease of Operation: The intuitive dashboard minimized the learning curve for operators, enhancing productivity.
Scalability: The plug-and-play nature of the EIGEMBox allowed the client to replicate the solution across other tools with minimal effort.
Feedback
The client expressed their satisfaction with the EIGEMBox solution, highlighting its impact on their manufacturing process.
“The EIGEMBox integration has been a game-changer for us. It bridged the gap between our DNS tool and the MES seamlessly, unlocking a new level of automation and efficiency. We’re especially impressed by how quickly it was deployed and the support provided by the Einnosys team,” shared the Operations Manager of the semiconductor facility.