Let’s talk about a few more SEMI standards E116, E157, E148
SEMI E116 – Specification for Equipment Performance Tracking
This Standard gives a specification for implementing basic equipment performance tracking (EPT) for production equipment. Provisions UNDER E116 enable the host computer to track equipment basic performance in a consistent and automated matter, without any intervention by the operator or host.
This Standard E116 provides a specification to equipment suppliers for:
● Tracking the basic equipment states (no operator or host input required).
● Tracking basic equipment states in a modular manner, for both major modules and the overall equipment.
● To Report basic equipment state changes to a host computer, at both module and equipment level.
● To Report equipment’s time in the state to a host computer, at both module and equipment level.
● To Report reasons to a host computer for why equipment is blocked from performing its task, at both module and equipment level.
Equipment users need the feature of tracking the performance of the equipment without any dependence on user input to eliminate inaccuracies due to incorrect or untimely input from the user. The ability to track the performance of the equipment without user input is very much required in 300 mm wafer factories where very minimal manual interaction is required.
EPT defines concepts, behavior, and message services that enable the host computer to obtain the equipment data required for equipment performance tracking in anconsistent and automated pattern without operator or host input.
EPT helps factory managers to identify the current states of factory equipment, both at the equipment level and at the module level (e.g., processing chambers), without dependence on user input.
EPT helps factory engineers to analysis the time that equipment and modules spent in different states and identify areas for improvement.
EPT enables factory engineers to obtain directly from the equipment the reasons why the equipment or module is prevented from performing.
EPT provides industrial engineers the equipment data which, when combined with external data from the Manufacturing Execution System (MES), will enable accurate calculation of SEMI E10 states and SEMI E79 metrics at the equipment-level and the module level.
EPT helps automation engineers to create reusable host interfaces by using a standardized collection event and data variables to collect equipment state data.
This Standard defines equipment behavior states and the data required to track basic equipment performance for production equipment. These requirements are intended to facilitate equipment-level and module-level state tracking and to communicate state information to the host for simple equipment performance tracking, without requiring host or operator input.
EPT state model defines the following:
● An EPT state model defines various triggers for state changes.
● It also gives a specification of data variables required to communicate basic equipment performance data to the host computer.
● It gives a specification of event messages used to communicate basic equipment performance data to the host computer.
● Requirements for EPT compliance.
● It specifies the concepts, message & behaviour services that enable the host computer to obtain the equipment data required for equipment performance tracking in an automated and consistent manner, without operator or host input. However It does not specify the report of SEMI E10 states from the equipment to a host computer, as this information requires user input and which is already specified in SEMI E58.
Standard E116 neither conflicts with SEMI E58 nor does it inhibit the equipment’s ability to report out SEMI E10 states via SEMI E58.
E116 Standard forms the base for SEMI E10 and SEMI E79 by giving accurate equipment information required for SEMI E10 and SEMI E79 metrics, without depending on operator or host input, thus it eliminates inaccuracies due to incorrect/untimely input from the user.
EPT helps SEMI E10 and SEMI E79 by giving a modular approach to equipment performance tracking, and allowing the state of the equipment to be determined by the states of its major modules. EPT also helpls SEMI E79 by providing task-level detail of the equipment or module’s current activity, thereby allowing performance metrics to be tracked at the task level.
SEMI E157 – Gives Specification for Module Process Tracking
This Specification defines a standard equipment capability to report Process – related data to the factory system. The main objective of this Specification are the activities of a processing location which are related to the recipe execution. Collection of process data during recipe execution is important for semiconductor Factories of today as it needs to support various applications that help optimize equipment processes, finished product quality, yield, and overall factory performance. The capacity of the processing data provides a factory’s applications the ways of connecting sampled time series data and summary process data to related context data. Standard events that document recipe execution in this complete process module guarantee the availability of such context information. The context data may have items such as identification of process job, affected substrates and equipment recipe. The reporting capability gives a record of start and/or end of processing, with granularity to the recipe step level.
Reporting of these events must be process module-specific to support the reporting of process module-specific data parameters. Each process module shall have typically a different set of process data parameter values & context A generic event, which applies to all process chambers,
will report the same data, independent of which process module the current event report represents. Such generic events do not support reporting of different data sets for each process module, as required to capture the unique data parameters available from each event.
This standard related to data collection related to that portion of equipment recipe execution which directly affects the processing locations within production equipment.
This standard adheres is following:
This standard adheres is following:
● Equipment recipe execution as it directly has an impact on process modules
● Process module state model for execution of recipe
● Event reporting for process data collection
● Process context data parameters
● Equipment recipe components and recipe steps contained in the recipe components as they are applicable to process modules
SEMI E148 – Specification for Time Synchronization and Definition of the TS-Clock Object.
The main aim this standard is to define the requirements for any factory component computer clock that requires synchronization of time to manage and maintain date/time accurately and consistently by using a common time synchronization protocol.
E148 defines the TS-Clock main aim for accessing factory application and equipment time value and synchronization status, it also describes an example of network time synchronization architecture, and mentions which protocol to use for precise time synchronization of clocks in factory environments that use network communication.
NTPc3(Network Time Protocol) protocol for time synchronization is specifically mentioned in this document as it is applicable to systems communicating by local area networks supporting
multicast messaging including but it is not limited to Ethernet. This protocol helps various systems that include clocks of various inherent precision and stability to synchronize.multicast messaging including but it is not limited to Ethernet. This protocol helps various systems that include clocks of various inherent precision and stability to synchronize.
eInnoSys is a global leader in Equipment Software & Fab Automation for Semiconductor, Solar(PV), LED, FPD and other related Electronics industries Experts at SECS/GEM, GEM300, Smart Factory & Industry 4.0